Width-dependent interaction of trench-like microdischarges arranged in sub-arrays on a single silicon-based chip

Author: Kulsreshath M K   Golda J     Dussart R  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.23, Iss.4, 2014-08, pp. : 45012-45022

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