Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

Author： Hua-Cheng Qiu   Feili Dara   Xue-Zhong Wu   Seidel Helmut  

Publisher： IOP Publishing

ISSN： 1674-1056

Source： Chinese Physics B, Vol.23, Iss.2, 2014-02, pp. : 27701-27705

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