Related content

Mechanism of amorphous Ge 2 Sb 2 Te 5 removal during chemical mechanical planarization in acidic H 2 O 2 slurry

By Ao-Dong He   Zhi-Tang Song   Bo Liu   Min Zhong   Liang-Yong Wang   Ye-Gang Lü   Song-Lin Feng  

Chinese Physics B, Vol. 22, Iss. 1, 2013-01 ,pp. : 18503-18507

IOP Publishing

Access to resources Recommend Favorite

Chemical mechanical planarization of Ge₂Sb₂Te₅ using IC1010 and Politex reg pads in acidic slurry

By Ao-Dong He   Bo Liu   Zhi-Tang Song   Liang-Yong Wang   Wei-Li Liu   Gao-Ming Feng   Song-Lin Feng  

Chinese Physics B, Vol. 23, Iss. 8, 2014-08 ,pp. : 88502-88507

IOP Publishing

Access to resources Recommend Favorite

Temperature-dependent thermal characterization of Ge2Sb2Te5 and related interfaces by the photothermal radiometry technique

By  

Journal of Physics: Conference Series , Vol. 214, Iss. 1, 2010-03 ,pp. : 483-486

IOP Publishing

Access to resources Recommend Favorite

Thermal effect of Ge₂Sb₂Te₅ in phase change memory device

By Jun-Tao Li   Bo Liu   Zhi-Tang Song   Kun Ren   Min Zhu   Jia Xu   Jia-Dong Ren   Gao-Ming Feng   Wan-Chun Ren   Hao Tong  

Chinese Physics B, Vol. 23, Iss. 8, 2014-08 ,pp. : 87804-87807

IOP Publishing

Access to resources Recommend Favorite

Investigations on phase change characteristics of Ti-doped Ge2Sb2Te5 system

By  

Journal of Physics D: Applied Physics, Vol. 48, Iss. 47, 2015-12 ,pp. : 475108-475114

IOP Publishing

Access to resources Recommend Favorite