Atomic Force Microscopy Analysis of Statistical Roughness of GaAs Surfaces Originated by Thermal Oxidation

Author: Klapetek Petr   Ohlídal Ivan   Navrátil Karel  

Publisher: Springer Publishing Company

ISSN: 0026-3672

Source: Microchimica Acta, Vol.147, Iss.3, 2004-06, pp. : 175-180

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