Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)

Author： Schroettner Hartmuth   Schmied Mario   Scherer Stefan  

Publisher： Springer Publishing Company

ISSN： 0026-3672

Source： Microchimica Acta, Vol.155, Iss.1-2, 2006-09, pp. : 279-284

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