Segregation of organic impurities in thin electroplated Cu metallizations

Author: Stangl Marcel   Acker Jörg   Hoffmann Volker   Gruner Wolfgang   Wetzig Klaus  

Publisher: Springer Publishing Company

ISSN: 0026-3672

Source: Microchimica Acta, Vol.156, Iss.1-2, 2006-11, pp. : 159-162

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