Twyman-Green interferometer using virtual optics for eliminating reference wave

Author: Min Cheol-Ki   Jeon Sungbin   Moon Hyungbae   Park Kyoung-Su   Park No-Cheol   Yang Hyunseok   Park Young-Pil  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.19, Iss.9-10, 2013-09, pp. : 1505-1511

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