Improved design of polymeric composite electrothermal micro-actuator for high track density hard disk drives

Author： Yang J.   Lau G.   Tan C.   Chong N.   Thubthimthong B.   Gonzaga L.   He Z.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.19, Iss.9-10, 2013-09, pp. : 1697-1704

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