Author: Wu Weiping Yi Hong Chen Di Lu Rongsheng Yuan Tao Chen Jingdong Ni Zhonghua
Publisher: Springer Publishing Company
ISSN: 0946-7076
Source: Microsystem Technologies, Vol.20, Iss.3, 2014-03, pp. : 419-425
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
Design and fabrication of a SU-8 based electrostatic microactuator
By Dai Wen Lian Kun Wang Wanjun
Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. :