Analysis and design for piezoresistive accelerometer geometry considering sensitivity, resonant frequency and cross-axis sensitivity

Author： Liu Yan Zhao Yulong Tian Bian Sun Lu Yu Zhongliang Jiang Zhuangde

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.3, 2014-03, pp. : 463-470

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