Pre-bond megasonic cleaning with improved process control

Author： Dussault D.   Liebscher E.   Fournel F.   Payen N.   Dragoi V.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 545-550

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