Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications

Author： Wasisto Hutomo Huang Kai Merzsch Stephan Stranz Andrej Waag Andreas Peiner Erwin

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 571-584

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