Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes

Author： Manzaneque Tomás Ruiz-Díez V. Hernando-García J. Ababneh A. Al-Omari A. Kucera M. Bittner A. Schmid U. Seidel H. Sánchez-Rojas J.

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 691-699

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