Production of vertical nanowire resonators by cryogenic-ICP–DRIE

Author： Merzsch S.   Steib F.   Wasisto H.   Stranz A.   Hinze P.   Weimann T.   Peiner E.   Waag A.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 759-767

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