Principles of nonlinear MEMS-resonators regarding magnetic-field detection and the interaction with a capacitive read-out system

Author： Stifter Michael Keplinger Franz Steiner Harald Hortschitz Wilfried Sauter Thilo

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 783-791

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