Design and characteristics of a-Si-based micro-bolometers with shared-anchor structure in vacuum packaged systems

Author: Jung Ho   Kim Tae   Kim Gyungtae   Yang Chung   Park Jae   Kim Hee  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 899-905

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