Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle

Author： Tumpold David Kaltenbacher Manfred Glacer Christoph Nawaz Mohsin Dehé Alfons

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 995-1006

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