FTIR absorption spectroscopy as a novel method for thin film deposition rate measurement

Author: Reichenbacher Thomas   Schuetz Simon   Stasewitsch Ilja   Fabig Stephan  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.114, Iss.4, 2014-03, pp. : 1295-1301

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