On the oxygen content in sputtering InOx film for transparent electronics

Author: Chuang Miao-Ju   Chu Ann-Kuo   Wang Jee-Ray  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.25, Iss.4, 2014-04, pp. : 1804-1809

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