Is actinometry reliable for monitoring Si and silicone halides produced in silicon etching plasmas? A comparison with their absolute densities measured by UV broad band absorption

Author： Kogelschatz M.   Cunge G.   Sadeghi N.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|33|3|205-212

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.33, Iss.3, 2006-02, pp. : 205-212

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