Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantation

Author： Dorranian D. Azadfar P. Sari A. H. Ghorbani S. Hojabri A. Ghoranneviss M.

E-ISSN： 1286-0050|42|2|103-107

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.42, Iss.2, 2008-03, pp. : 103-107

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