Pulsed laser deposition of c-axis oriented aluminum nitride thin films on silicon

Author： Tabbal M. Mérel P. Chaker M. Pépin H.

E-ISSN： 1286-0050|14|2|115-119

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.14, Iss.2, 2010-03, pp. : 115-119

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