Design of a micro-mechanical capacitor with microwave functions*

Author： Bazin G.   Sangouard P.   Bildstein P.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|9|1|75-80

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.9, Iss.1, 2010-03, pp. : 75-80

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