High performance LTPS TFT with very large grains produced by sequential lateral crystallization

Author： Park S. J. Kang S. H. Ku Y. M. Jang J.

E-ISSN： 1286-0050|31|3|165-168

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.31, Iss.3, 2005-09, pp. : 165-168

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