Interfacial reactions in relation with adhesion failures in Al/TiN/Ti/SiO2 and Al/TiN/Ti/borophosphosilicate glass systems

Author: Alfonso C.   Fares L.   Huiban Y.   Gallet D.   Ismeurt M.   Charaï A.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|22|1|3-10

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.22, Iss.1, 2003-04, pp. : 3-10

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Abstract