Deposition of optical coatings with real time control by the spectroellipsometry

Author： Bulkin P.   Daineka D.   Kouznetsov D.   Drévillon B.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|28|2|235-242

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.28, Iss.2, 2004-11, pp. : 235-242

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