Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

Author: Naeim I.   Khodier S.  

Publisher: Edp Sciences

E-ISSN: 2107-6847|3|2|97-100

ISSN: 2107-6839

Source: International Journal of Metrology and Quality Engineering, Vol.3, Iss.2, 2012-11, pp. : 97-100

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Abstract