Influence of microwave plasma microprocessing on the electronic properties of the (100)Si surface

Author: Yafarov R.   Klimova S.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.59, Iss.3, 2014-03, pp. : 411-415

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next