Analysis features of elemental composition of boron carbonitride films by EDS

Author: Sulyaeva V.   Maksimovskii E.   Kosinova M.   Rumyantsev Yu.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 2070-2051

Source: Protection of Metals and Physical Chemistry of Surfaces, Vol.50, Iss.2, 2014-03, pp. : 273-277

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