Particle energy distributions and metastable atoms in transient low pressure interpulse microwave plasma

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|6|65004-65013

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.6, 2015-12, pp. : 65004-65013

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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