Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|6|65008-65016

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.6, 2015-12, pp. : 65008-65016

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