Realization of an ultra-flat silica surface with angstrom-scale average roughness using nonadiabatic optical near-field etching

Author： Yatsui T.   Hirata K.   Nomura W.   Tabata Y.   Ohtsu M.  

Publisher： Springer Publishing Company

ISSN： 0946-2171

Source： Applied Physics B, Vol.93, Iss.1, 2008-10, pp. : 55-57

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