Submicron coatings for micro-tribological applications

Author: Bandorf R.   Lüthje H.   Schiffmann K.   Beck M.   Gatzen H.-H.   Schmidt M.   Büttgenbach S.   Bräuer G.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.10, Iss.3, 2004-03, pp. : 223-226

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