An investigation on technologies to fabricate magnetic microcomponents for miniaturized actuator systems

Author： Budde T.   Föhse M.   Majjer B.   Lüthje H.   Bräuer G.   Gatzen H.H.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.3, 2004-03, pp. : 237-240

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