Micromachined silicon via-holes and interdigital bandpass filters

Author: Zhu Jian   Yu Yuanwei   Yang Naibin   Zhou Bailing   Zhang Yong  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 913-917

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