Defect-free wet etching through pyrex glass using Cr/Au mask

Author： Tay Francis   Iliescu Ciprian   Jing Ji   Miao Jianmin  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 935-939

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