Author: Kasanická B. Müller M. Auhorn M. Schulze V. Bauer W. Beck T. Ritzhaupt-Kleissl H. Löhe D.
Publisher: Springer Publishing Company
ISSN: 0946-7076
Source: Microsystem Technologies, Vol.12, Iss.12, 2006-10, pp. : 1133-1141
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