Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors

Author： Feldmann M. Waldschik A. Büttgenbach S.

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 557-562

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuators

By Cui T. Markus D. Zurn S. Polla D. L.

Microsystem Technologies, Vol. 10, Iss. 2, 2004-01 ,pp. : 137-141

Springer Publishing Company

Access to resources Recommend Favorite

Electro-Conjugate Fluid Jet-Driven Micro Artificial Antagonistic Muscle Actuators and their Integration

By Yokota Shinichi Yajima Fumiya Takemura Kenjiro Edamura Kazuya

Advanced Robotics, Vol. 24, Iss. 14, 2010-10 ,pp. : 1929-1943

Taylor & Francis Ltd

Access to resources Recommend Favorite

Sensors and actuators for 'humanoid' robots

By Dario Paolo Laschi Cecilia Guglielmelli Eugenio

Advanced Robotics, Vol. 11, Iss. 6, 1996-01 ,pp. : 567-584

Taylor & Francis Ltd

Access to resources Recommend Favorite

Computer models of 3D magnetic microfibres used in textile actuators

By Wiak Slawomir Firych-Nowacka Anna Smólka Krzysztof

COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol. 29, Iss. 5, 2010-09 ,pp. : 1159-1171

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Fast And Accurate 3D Rendering Of Automotive Coatings

By Kirchner Eric van der Lans Ivo Ferrero Alejandro Campos Joaquín Martínez-Verdú Francisco M. . Esther Perales

Color and Imaging Conference, Vol. 2015, Iss. 1, 2015-10 ,pp. : 154-160

Society for Imaging Science and Technology

Access to resources Recommend Favorite