3D-feature-based structure design for silicon fabrication of micro devices

Author： Liu Yang   Jiang Pingyu   Zhang Dinghong   Zhou Guanghui  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.7, 2007-04, pp. : 701-714

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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