Nanofabrication of solid surface using probe oxidation

Author: Fukuzawa Kenji   Deguchi Takanori   Muramatsu Takuro   Zhang Hedong   Mitsuya Yasunaga  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 1219-1225

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