Author： Suzuki Takaaki Teramura Yuji Hata Hidetoshi Inokuma Koki Kanno Isaku Iwata Hiroo Kotera Hidetoshi
Publisher： Springer Publishing Company
ISSN： 0946-7076
Source： Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 1391-1396
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