A nodal analysis method for simulating the behavior of electrothermal microactuators

Author： Li Ren-Gang   Huang Qing-An   Li Wei-Hua  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.14, Iss.1, 2008-01, pp. : 119-129

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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