Gallium arsenide suspended microheater for MEMS sensor arrays

Author: Hotovy I.   Rehacek V.   Mika F.   Lalinsky T.   Hascik S.   Vanko G.   Drzik M.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.14, Iss.4-5, 2008-04, pp. : 629-635

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