Realisation and metrological characterisation of thickness standards below 100 nm

Author: Thomsen-Schmidt P.   Hasche K.   Ulm G.   Herrmann K.   Krumrey M.   Ade G.   Stümpel J.   Busch I.   Schädlich S.   Schindler A.   Frank W.   Hirsch D.   Procop M.   Beck U.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.78, Iss.5, 2004-03, pp. : 645-649

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