Micro-Raman spectroscopic investigation of NiSi films formed on BF2+-, B+- and non-implanted (100)Si substrates

Author: Donthu S.K.   Chi D.Z.   Tripathy S.   Wong A.S.W.   Chua S.J.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.79, Iss.3, 2004-08, pp. : 637-642

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