Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

Author： Lackner J.M.   Waldhauser W.   Ebner R.   Beutl M.   Jakopic G.   Leising G.   Hutter H.   Rosner M.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.79, Iss.4-6, 2004-09, pp. : 1525-1527

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