Exploring microstencils for sub-micron patterning using pulsed laser deposition

Author: Vroegindeweij F.   Speets E.A.   Steen J.A.J.   Brugger J.   Blank D.H.A.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.79, Iss.4-6, 2004-09, pp. : 743-745

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