Sacrificial etching of AlxGa1-xAs for III–V MEMS surface micromachining

Author： Kumar P.   Kanakaraju S.   DeVoe D.L.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.88, Iss.4, 2007-09, pp. : 711-714

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