Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications

Author： Espinosa A.   Rabenorosoa K.   Clévy C.   Komati B.   Lutz P.   Zhang X.   Samuelson S. R.   Xie H.  

Publisher： Taylor & Francis Ltd

ISSN： 1559-9612

Source： International Journal of Optomechatronics, Vol.8, Iss.3, 2014-07, pp. : 179-194

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