High-speed metrological large range AFM

Author： DaiGaoliang   ZhuFan   FlueggeJens  

Publisher： IOP Publishing

E-ISSN： 1361-6501|26|9|95402-95411

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.9, 2015-09, pp. : 95402-95411

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